After different processes in the semiconductor wafer manufacturing process, it is often necessary to carry out size measurement, defect detection and so on, which are used for process control and yield management, which are required to be fast and accurate. In the process of development, IC measurement and testing are faced with various technical difficulties in terms of miniaturization, complex 3D and new materials, and are constantly upgrading in the face of different semiconductor testing requirements, such as storage, CIS, chemical semiconductors and so on.
Process control accounts for about 1113% of IC manufacturing equipment, and there is a continuous need for upgrading. In 2020, the global market space for process control equipment is about US $7.3 billion, of which lithography related requirements (such as engraving error measurement, mask measurement and testing, etc.) are about US $2 billion, defect detection is about US $3.9 billion, and film thickness measurement is about US $1.1 billion. The proportion of process control market in the global market is basically maintained at 1113%, which is relatively stable. with the advance of process miniaturization and 3D stacking, the demand for measurement and testing in wafer manufacturing is increasing, and the precision requirements are also increasing. Process control equipment continues to be upgraded.
The global process control market is mainly dominated by overseas leader KLA. According to SEMI data, the main track of global process control is dominated and monopolized by overseas manufacturers. KLA has obvious advantages in most sub-areas. In addition, AMAT, ASML, Nova and Hitachi are also laid out. The main layout of domestic companies, such as Shanghai Precision Test, Ruili Science, Zhongke Flying Test, Sateng shares and so on.
In the domestic leading storage fab project, the localization rate of process control equipment is less than 10%. According to the statistics of public bidding information, there are about 350 bid-winning process control equipment for the Yangtze River storage project as of 2021ap06, of which about 14 are made in China. In Shanghai, there are 6 integrated film thickness equipment, 1 wafer surface depression detection system, 5 optical surface 3D topography measurement equipment, and 1 dielectric film measurement system. The number of KLA equipment accounts for about 26% of the total number, and the number of winning bidders is about 93, covering nearly 40 kinds of measurement and testing requirements.
Shanghai precision testing comprehensive layout of film thickness and OCD testing, SEM testing and other technical direction. In terms of film thickness, Shanghai Precision Test has launched a variety of semiconductor measurement equipment, such as film thickness testing equipment, OCD testing equipment and so on. The evolution path of the technology is from EFILM 200UF for film thickness detection to EFILM 300IM, then to EFILM 300SShand DS, and then to EPROFILE 300FDfor OCD measurement, with richer functions and higher precision. In the direction of electron optical SEM testing, the company has delivered the first electron beam testing equipment at the end of 2020 and the first OCD equipment in 2021.
Ruili Science was founded in 2005, focusing on semiconductor measurement and testing equipment. Ruili's main products are optical film thickness measuring equipment and optical defect detection equipment. In April 2021, Ruili's first self-developed high-precision optical defect detection equipment (WSD200) was boxed and shipped. In June, 2021, the company independently developed the third generation optical film thickness measurement equipment TFX4000i delivery equipment.
Zhongke Flying Test, headquartered in Longhua District, Shenzhen, independently develops the world's leading optical testing technology for production quality control, with industrial intelligent testing equipment as the core product. The company's downstream customers have officially shipped size measurement, defect detection equipment and so on.
Risk hints: the progress of localization is not as expected, the impact of global trade disputes, and the uncertainty of downstream demand.
